Wafer Spinner - SEE DESCRIPTION (G5-213047.1) 5-B193-Q-00686-00
Summary
AI-generated · Aug 25, 2025Acquire a single wafer spinner capable of handling photoresist and other polymers, including a splash ring and a 150 mm wafer format. Required features: selectable spin speeds of 50–99 rpm and 100–8000 rpm (+/−1 rpm), safety glass bowl cover, removable polypropylene process bowl, digital vacuum gauge and monitoring, cover-open interlock, 115 VAC single-phase power, acceleration of 4000 rpm/s, programmable spin time from 1 to 999 seconds, and support for 200 recipes with up to 40 steps each. Includes a front-mounted 0.5 L waste bottle, PG11 exhaust connection, and maximum dimensions of 350×446×430 mm. Also specified are a directly-coupled hollow-shaft motor with a transparent liquid separator on the vacuum line, spin chucks for 150 mm, 100 mm, 3" and 2" wafers with centering rings, a piece chuck with a 3 mm diameter vacuum area, plus spare bowl and spare waste bottle, and options for future dispense and edge bead upgrades.
Submit with the attached solicitation package, ensuring the ANL-70 form is completed with points A–F on page 3; submissions missing any required components will be discarded. The package requires completion by 8/13/25 at 12:00 PM CST. For questions, contact awegrzyn@anl.gov.
Argonne National Laboratory is seeking to source: 1qty Wafer spinner that can spin photoresist and other polymers - splash ring - speed 50-99rpm, 100-8000rom (+/- 1 rpm) with 150mm round - Bowl Cover made of safety glass - Process bowl of polypropylene (removable) - d- igital vacuum gauge - vacuum monitoring - cover open interlock - 115VAC 60/50hz 5/3 single phase - Acceleration 4000 rpm/sec - spinning time 1s-999s - 200 recipes with 40 steps each - waste bottle (0.5l in front of spinner) - Exhaust connection PG11 tube - Dimension: (wxdxh) cannot exceed (350x446x430mm) - directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line - spin chucks for : 150mm, 100mm, 3", 2" - with centering rings - piece chuck with 3mm diameter vacuum area - spare bowl - spare waste bottle - options for future dispense and edge bead upgrades Please see attached solicitation package - on the ANL-70 form: Please remember to complete points A-F on page 3. NO SOLICITATION WILL BE CONSIDERED WITHOUT ALL THESE COMPLETED. If any components are missing, your solicitation will be discarded. All forms and signed solicitation have a requested completion date of 8/13/25 at 12PM CST. If there are any questions please feel free to reach out to awegrzyn@anl.gov.
From Solicitation posted on Aug 08, 2025Notice history
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Solicitation LATEST Posted Aug 08, 2025
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