Mass Flow Controller RFQ406600
Summary
AI-generated · Aug 30, 2025Mass flow controller for methyltrichlorosilane (CH3Cl3Si) with IP65 enclosure and 316 stainless steel wetted parts. Must regulate flow from 3 to 150 G/H (full scale 200 G/H) with 0.2% accuracy and a 7-point calibration at 0%, 2.5%, 5%, 10%, 25%, 50%, and 100%. Inlet pressure 30 psi gauge, outlet pressure up to 700 Torr gauge, normally closed valve, and operation at 20 C. Seals and plunger to be Kalrez 6375; 1/4" OD compression inlet/outlet. Output signal 4-20 mA sourcing with 4-20 mA sinking setpoint; control is analog. Supply voltage +15 to +24 VDC; weight approximately 2 kg.
Mass Flow Controller Oak Ridge National Laboratory is in need of mass flow controller. IP65, 316 SS, FLOW CONTROL , FLUID CH3CL3Si (METHYLTRICHLOROSILANE), 3...150 G/H, FULL SCALE FLOW 200 G/H, ACCURACY 0.2%,( 7 POINT CAL (0%,2.5%,5%, 10%, 25%, 50%, 100%) , INLET PRESSURE 30 PSI G, OUTLET PRESSURE 700 TORR G, NORMALLY CLOSED VALVE, TEMP 20 C, SEALS KALREZ 6375, PLUNGER KALREZ 6375, 1/4" OD COMPRESSION INLET/OUTLET, 4-20 MA SOURCING OUTPUT, SETPOINT 4-20 MA SINKING, CONTROL ANALOG, +15..24 VDC, 2KG
From Combined Synopsis/Solicitation posted on Aug 28, 2025Mass Flow Controller Oak Ridge National Laboratory is in need of mass flow controller. IP65, 316 SS, FLOW CONTROL , FLUID CH3CL3Si (METHYLTRICHLOROSILANE), 3...150 G/H, FULL SCALE FLOW 200 G/H, ACCURACY 0.2%,( 7 POINT CAL (0%,2.5%,5%, 10%, 25%, 50%, 100%) , INLET PRESSURE 30 PSI G, OUTLET PRESSURE 700 TORR G, NORMALLY CLOSED VALVE, TEMP 20 C, SEALS KALREZ 6375, PLUNGER KALREZ 6375, 1/4" OD COMPRESSION INLET/OUTLET, 4-20 MA SOURCING OUTPUT, SETPOINT 4-20 MA SINKING, CONTROL ANALOG, +15..24 VDC, 2KG
From Combined Synopsis/Solicitation posted on Sep 08, 2025Notice history
2-
-
Combined Synopsis/Solicitation LATEST Posted Sep 08, 2025View changes (1)
- Response Deadline: Sep 05, 2025 → Sep 15, 2025
Details
Award Information
Not yet awarded
Documents
7Contacts
Phone
Agency
Place of Performance
USA