5kW Microwave Plasma CVD System 5-S176-Q-00652-00

The purpose of this purchase is to satisfy the needs of the Autonomous Discovery LDRD PRJ1012745 and get a CVD reactor (full assembly or kit version) for the synthesis of single crystal boron doped diamond (BDD) fully forward compatible with the autonomous operation vision of the project: - Microwave (2.45 GHz) Driven Chemical Vapor Deposition reactor or kit assembly with at least 2.5 kW of power, 5 kW is ideal. - Present a large loading port to allow for, at a minimum, loading of 1 inch substrate holders, ideally this number should be two inch. Overall, something like a ICF152 is ideal to allow for easy loading and unloading of a 2” Mo puck substrate holder. - Vacuum gate valve on the main ICF152 loading port. - Have the ability to automatically tune the microwave power delivery, while being integrated with a circulation, dummy load, and waveguide assembly. - Present multiple ICF70 viewports (at least 8) for future in-situ characterization. At least four of those should be placed at an angle for future in-situ ellipsometry integration. - Present MFC configuration to allow for synthesis of BDD: four MFCs configured for H2, CH4, O2, and a flexible final H2 MFC for the boron precursor. - Pressure controller with associated gauges - PLD controller and process software with associated control computer and electronics. Overall, fully automated recipe/computer driven operation is critical. Please provide the following no later than noon CDT on Friday, July 25, 2025: - Appendix “A” Argonne Terms and Conditions for Commercial Items and Services, ANL-71-COM, dated 2/13/2023 (REVIEW AND ACCEPT) - Proposal with details supporting the technical capability and adherance to the provided specifications (please remove pricing from this proposal) - Lead Time - Country of Origin (must be more than 65% USA-manufactured to be considered "Made in USA" - Ship from Address - Completed and signed ANL-70 Request for Quotation - Completed and signed ANL-70B Reps and Certs Please send any questions to the Contracting Officer. Thank you in advance for your submission.