STS Mesc Multiplex ICP DRIE Upgrade and Repair

The National Institute of Standards and Technology is seeking qualified sources to provide the following repair and upgrade service. If your company is interested and qualified, please submit your qualifications and documentation to show you can fulfill the below requirements. Your documentation is due to Aron Krischel, Contracting Officer, by email at [email protected], no later than April 4, 2018 at 2 pm MST. LAB REQUESTING SERVICE: Quantum Electromagnetics Division, Physical Measurements Laboratory, National Institute of Standards and Technology I. BACKGROUND INFORMATION NIST-Boulder has a state-of-the-art research laboratory (the Katharine Bloggett Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF). Among the many critical pieces of equipment in this laboratory is a STS Mesc Multiplex ICP Deep Reactive Ion Etching (DRIE) tool. The DRIE is comprised of many control subsystems that are required to communicate with each other. If the communication between these subsystems fails, the tool is inoperable and NIST mission critical work is halted since the DRIE is a critical step in many NIST mission critical devices. In order to keep a high tool uptime, the BMF requires a tool retrofit of the input/output (IO) signal system, the control systems, signal wiring, communication subsystems, computers, and software to extend the DRIE's service life. II. SCOPE OF WORK: a. PURPOSE: Provision of a Programmable Logic Controller (PLC) retrofit the IO system, the control systems, signal wiring, communication subsystems, computers, and software of the BMF's STS Mesc Multiplex ICP DRIE tool to extend the tool service life. b. GENERAL REQUIREMENTS: 1. Contractor shall provide evidence of experience in providing a PLC retrofit the IO system, the control systems, signal wiring, communication subsystems, computers, and software of a STS Mesc Multiplex ICP DRIE tool. 2. Contractor shall provide personnel that have been factory trained by the original manufacturer (STS/SPTS). This condition shall be supported by appropriate documentation. 3. Contractor shall provide personnel that are US Citizens that pass required government background checks to be issued badges for work on site. 4. Contractor shall provide a bid proposal which details all planned materials, consumables, travel, labor, equipment, and expenses. c. SPECIFIC REQUIREMENTS: 1. At a time negotiated after award of contract, the contractor shall provide a Programmable Logic Controller (PLC) retrofit the IO system, the control systems, signal wiring, communication subsystems, computers, and software of the BMF's STS Mesc Multiplex ICP DRIE tool to the following specifications: (a) System Hardware: (1) The contractor shall retrofit the control system including IO system, the control systems, signal wiring, communication subsystems, computers with new, non-proprietary equipment. When the PLC upgrade is completed: i. The tool must no longer require the use of: • The STS plasmakit modules from the e-rack drawer except for the AMC1A modules. • The PFC modules from the gas box. • The process pc located in the e-rack and the load lock pc. ii. The tool must be controlled by a new non-proprietary computer iii. The AMC modules must be modified to interface with the new controller. (2) The contractor shall supply documentation, such as wiring diagrams, for all electrical connections in the PLC upgrade. (b) Software User Interface: (1) The contractor shall supply a user interface that includes a configuration editor, a recipe editor, and a system control Graphical User Interface (GUI.) (2) The user interface must be able to automate the use of the process tool in a manual and automatic mode. (3) The contractor shall provide a limited license to permit editing of the source code for the software. (4) The configuration editor must allow the user to set configuration parameter that are global for all system processing. This editor must allow the user to change system components, including but not limited to: mass flow controllers, temperature controllers, Baratrons, ICP settings, and change their system parameters. (5) The recipe editor must: i. Allow the user to create an unlimited number of recipes that can be used to run the process tool. ii. The recipe must be able to be used to have the system controller automatically process a sample when the tool is in automatic mode. iii. The recipes must be allowed to be stored on the computer hard drive. (6) The system user interface must: i. Allow the user to see the status of the entire system. ii. Show a schematic layout of the vacuum and gas delivery systems. iii. Allow the user to run a recipe that automatically process a sample when the tool is in automatic mode. iv. Allow the user to change a state of tool components such as a valve, mass flow controller, ICP settings, or pressure reading on the screen and the corresponding function will be executed on the process tool when the tool is in service mode. v. Have a message on the screen that tells the user what the system is doing. 2. The contractor shall supply all items, hardware, and onsite labor required to retrofit the STS Mesc Multiplex ICP DRIE tool as described in this section (SPECIFIC REQUIREMENTS). 3. The contractor shall preserve all of the existing hardware and software safety interlocks. 4. The contractor shall maintain the current system's hardware functionality, while replacing only the current STS Plasmakit control platform. 5. The contractor shall fix bugs and provide minor software upgrades free of charge for three months after initial installation visit. 6. The contractor shall provide a one-year warranty of workmanship and software upgrades for one year. 7. The contractor shall supply an additional back-up hard drive with a bare metal backup of the retrofitted tool hard drive. The tool must be able to be run off of this second hard drive as well as the primary hard drive. 8. Once the contractor is completed with the retrofit, the STS Mesc Multiplex ICP DRIE tool must be able to: (a) Automatically pump down the load lock from atmosphere to vacuum and transfer a substrate from the load lock to the process chamber without faulting or damaging the substrate. (b) Automatically transfer a substrate from the process chamber to the load lock without faulting or damaging the substrate and change the pressure in the load lock from vacuum to atmosphere with pump purge sequencing. (c) Demonstrate full process control by processing a NIST supplied substrate using a NIST generated recipe. (d) Process a substrate by properly striking and maintaining a stable plasma, maintain gas flows, chamber pressure, RF power to coil and platen, matching for forward and reflected RF levels on coil and platen electrodes, display proper DC and peak-to-peak bias readings, and helium backsides cooling pressure and flow. (e) Demonstrate proper parameter tolerance monitoring of each recipe parameter. (f) Demonstrate proper parameter data logging of each recipe parameter. (g) Demonstrate recipe inter step of helium backside cooling leak up rate of rise. 9. To demonstrate proper system functionality after the retrofit, the etching properties of a silicon wafer under similar conditions before and after the PLC upgrade. The etch characteristics from before and after the upgrade must agree within 5 %. III. PERIOD OF PERFORMANCE Deliveries: Date of Award through one year. IV. PLACE OF PERFORMANCE a. All work shall be performed at U.S. DOC/NIST, 325 Broadway Bldg 81, Boulder, CO 80305. b. Normal business hours are Monday through Friday, 8:00 a.m. to 5:00 p.m. with the exception of Federal holidays. c. The day-to-day supervision and direct control over the work performed by the on-site contractor personnel will be the sole responsibility of the contractor. V. GOVERNMENT FURNISHED PROPERTY a. All property, data and information provided by the Government in the performance of this task remains the property of the Government and shall be surrendered to the government upon completion or termination of this requirement. Likewise, all deliverables generated under this requirement remain the property of the Government. b. The Government will provide visitor's access to the NIST facilities during the performance of this service contract. If a given hand tool is available, the Government will provide such tools during the performance of a given service call. VI. TRAVEL Travel to the NIST, Boulder is required. All travel expenses will be included in the price of this agreement and are the responsibility of the contractor. VII. CONTRACTOR SUPPLIED MATERIALS The contractor shall supply all materials required for the STS Mesc Multiplex ICP DRIE retrofit. VIII. CONTRACTOR'S MINIMUM QUALIFICATIONS a. Provide evidence of experience in retrofitting the IO system, signal wiring, and software of at least one STS Mesc Multiplex ICP DRIE tool. b. Provide personnel that are US Citizens that pass required government background checks to be issued badges for work on site. GENERAL INFORMATION: (1) Confidential or Proprietary Data: This work does not involve confidential or proprietary data. The certification and accreditation requirements of Clause 1352.239-73 do not apply and a security accreditation package is not required. (2) Safety: The Contractor employee shall be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal. (3) Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and also is shown to the armed Security Police when entering the campus. (4) Regular Business Hours. Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Mountain Standard Time. (5) Identification Badges: Contractor employees shall comply with NIST identification and access requirements. Each Contractor employee shall wear a visible identification badge provided by the NIST Security Office. (6) Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver's license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass shall be displayed on the vehicle in accordance with NIST Security Office instructions.